Russell Low – Biography

Last update: February 9, 2026

Executive profile

Russell was Vice President of Engineering at Veeco Instruments, and Director of Technology at Varian Semiconductor. Russell Low joined Axcelis Technologies in 2016. Russell served as Executive Vice President, Engineering and Executive Vice President, Global Customer and Engineering Operations for Axcelis Technologies.

Russell Low is currently

President, Chief Executive Officer and Director at Axcelis Technologies - View - Axcelis Technologies org chart



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Education

Russell Low has a Doctor of Philosophy in Physical Chemistry from University of Oxford in 1995 and a Master of Business Administration from Massachusetts Institute of Technology - Sloan School of Management in 2012.

They have also studied at University of Oxford :

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They have also studied at Massachusetts Institute of Technology - Sloan School of Management :

Find more alumni from Massachusetts Institute of Technology - Sloan School of Management

The colleagues of Russell Low

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  • In the Semiconductors industry, Russell Low has 10,213 colleagues in 578 companies located in 32 countries. 5,257 executive movements have been recorded in the last 12 months. Learn more about Semiconductors.

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Through the switchboard, call Axcelis Technologies at +1 978... and ask for Russell Low.

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