Robert Mahoney – Biography

Last update: February 9, 2026

Executive profile

Robert was Global Quality Manager at Varian Semiconductor, and Director of Quality Assurance at Genus. Robert Mahoney joined Axcelis Technologies in 2005. Robert served as Vice President, Quality and Product Support and Vice President, Global Service Solutions and Quality for Axcelis Technologies.

Robert Mahoney is currently

Executive Vice President of Global Operations at Axcelis Technologies - View - Axcelis Technologies org chart



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  • In the Semiconductors industry, Robert Mahoney has 10,229 colleagues in 578 companies located in 32 countries. 5,229 executive movements have been recorded in the last 12 months. Learn more about Semiconductors.

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Through the switchboard, call Axcelis Technologies at +1 978... and ask for Robert Mahoney.

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